| 简介 |
PROBLEM TO BE SOLVED : To provide a magnesium oxide vapor deposition material capable of forming a magnesium oxide film, in which rare earth metal is highly uniformly dispersed, by an electron beam vapor deposition process.
SOLUTION : The magnesium oxide vapor deposition material is composed of a polycrystal body of magnesium oxide crystal grains the average crystal grain size of which is in the range of 2.0 to 50 μm. In the magnesium oxide crystal grains, rare earth metal is solid-soluted in the range of 0.005 to 0.060 mass%.
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