| 简介 |
FIELD : chemistry.
SUBSTANCE : method of producing alkali-earth titanates involves reacting compounds of alkali-earth metals with particles of titanium dioxide in a solid phase reaction at temperature below 700°C. The titanium dioxide particles have specific surface area (BET) of over 50 m2/g and contain less than 1.5 wt %, preferably less than 0.3 wt %, most preferably less than 0.08 wt % sulphate relative TiO2. Titanium dioxide particles used can contain less than 1000 particles per million of chloride and less than 1000 particles per million of carbon. The obtained alkali-earth titanate has specific surface area (BET) ranging from 5 to 100 m2/g, and does not contain hydroxyl groups, embedded into the crystal lattice. Specific surface area (BET) of an uncrushed sample of alkali-earth titanate after calcination ranges from 5 to 50, preferably from 15 to 40 m2/g. A powdered composition for producing alkali-earth titanate, microelectronic element and method of obtaining it are proposed.
EFFECT : invention allows for obtaining fine-grained, high-purity alkali-earth titanates.
42 cl, 5 dwg, 8 ex |
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