| 简介 |
PROBLEM TO BE SOLVED : To provide a method of storing a tetrachlorosilane which is used for efficiently producing high purity silicon from tetrachlorosilane and to provide a method of producing silicon using tetrachlorosilane stored by the method as a raw material. SOLUTION : In the method of storing tetrachlorosilane, a vapor phase part of a container 21 for storing liquefied tetrachlorosilane contains a rare gas selected from among argon, helium, neon and a gaseous mixture thereof. In the storage of the liquefied tetrachlorosilane, the nitrification of silicon or the like in the reaction of producing silicon from tetrachlorosilane is prevented by using argon, helium, neon or the gaseous mixture thereof in place of gaseous nitrogen conventionally used as a seal gas. COPYRIGHT : (C)2010, JPO&INPIT |
客服热线：
手机版
二维码
