| 简介 |
FIELD : chemistry.
SUBSTANCE : invention relates to a composite target in form of a rod, made from ceramic powder and meant for evaporation under the effect of an electron beam, containing zirconium dioxide and at least one zirconium dioxide stabiliser. The stabiliser used is at least one element from a group of oxides of rare-earth elements, titanium oxide and niobium oxide. The target is distinguished by that, the said zirconium dioxide stabiliser is contained in molar concentration of 2-30%, and the said zirconium dioxide is 90% more than the formed monoclinic phase. The target has density of 3.9 g/cm3, average diametre pores d50 less than 2mcm and porosity ranging from 30 to 50%. The target is used when making a heat barrier with low heat conduction and high thermal resistance and mechanical strength from ceramics, formed through evaporation under the effect of an electron beam.
EFFECT : obtaining a target with optimum mechanical properties and heat resistance.
16 cl, 3 ex |
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