| 申请日期 | 2025-08-16 | 申请号 | WOUS18046755 |
| 公开（公告）号 | WO2019036500A1 | 公开（公告）日 | 2019-02-21 |
| 公开国别 | WO | 申请人省市代码 | 全国 |
| 申请人 | APPLIED MATERIALS INC | ||
| 简介 | Embodiments of the disclosure relate to articles, coated chamber components and methods of coating chamber components with a low volatile coating. The low volatile coating can include a rare earth metal-containing layer that coats all surfaces of a component (e.g., a high temperature heater). | ||
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