| 申请日期 | 2025-06-27 | 申请号 | JP2003299736 |
| 公开（公告）号 | JP4312006B2 | 公开（公告）日 | 2009-08-12 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | ASAHI DENKA KOGYO KK | ||
| 简介 | A tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I). The complex is excellent in heat resistance and volatility and is liquid, which is advantageous for use as a thin film forming material. wherein M is a rare earth metal atom. | ||
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