| 简介 |
Disclosed is a ceramic heater capable of preventing failures due to the thermal stress, such as cracks, and corrosion by a calcium component. The ceramic heater has a heating element including at least one substance selected from silicides, nitrides and carbides of molybdenum and silicides, nitrides and carbides of tungsten as a main component, and a base mainly containing silicon nitride in which the heating element is embedded, wherein the base includes : a rare earth element component in an amount from 4 to 25% by mass in terms of an oxide thereof; a silicide of chromium in an amount from 1 to 8% by mass in terms of chromium silicide; and an aluminum component in an amount from 0.02 to 1.0% by mass in terms of aluminum nitride. |
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