| 简介 |
A method for regenerating a container for plasma treatment, characterized in that, to a thermally sprayed coating comprising one of alumina, a rare earth metal oxide, a polyimide and polybenzimidazole, which has been deteriorated by the use in plasma, on the surface of a member inside a container for plasma treatment having a substrate and, applied thereon, the thermally sprayed coating, a material being the same as that for the deteriorated sprayed coating is re-sprayed. The method allows a container for plasma treatment having a surface deteriorated by the use in plasma to be generated into the one as good as new.© KIPO & WIPO 2009 |
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