| 简介 |
PROBLEM TO BE SOLVED : To provide an excimer lamp with high illuminance and high illuminance stability even if a chemically stable gas such as sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride is used.
SOLUTION : The excimer lamp has a rare gas and a fluoride filled in an arc tube 2 and at least one of electrodes 10, 11 is arranged on the outer face of the arc tube 2. The gas pressure in the arc tube 2 is 13.3 kPa or more in total pressure, and the fluoride is either of sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride, the molar ratio of the fluoride to the total gas is 0.001% to 10%. The rare gas is composed of either one of argon, krypton, or xenon and helium and/or neon, and the molar ratio of helium and/or neon to the total rare gas is 90% to 99.5%.
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