| 简介 |
PROBLEM TO BE SOLVED : To provide a palladium metal film laminated film which shows a stabilized surface resistance value with time.
SOLUTION : The palladium metal film laminated film is a laminate of a base film and the palladium metal film overlying at least its one side, wherein the consistency of rare gas contained in the metal film is 0.1-10 atm% or less. Moreover, the consistency of the palladium metal film is 9.00 g/cm3 or more. In addition, the palladium surface density A of the palladium metal film just after the film formation and the surface resistance value B of the palladium metal film just after the film formation satisfy formula (1) : A×B≤7, 000×1015.
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