| 简介 |
A hydrogen sensor (1) is provided with a substrate (2); a detection film (3) which is formed on the substrate and composed of a rare earth metal; a protection film (5), which is formed on the detection film and has hydrogen permeable metal particles (13) dispersed in a ceramic material (15); and a pair of electrodes (7, 9) which are formed on the protection film at an interval and are electrically connected with the detection film through the protection film. The hydrogen permeable metal particles are Pd, Pt, Nb, V and Ta, and a preferable content of the particles is 20-70 mass %. The resistance value of the protection film between the electrodes is preferably 10-100, 000?, and the resistance value of the detection film in the interelectrode direction is preferably smaller than that of the protection film, in the interelectrode direction. |
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