| 简介 |
PROBLEM TO BE SOLVED : To provide a method for producing cerium based polishing agent low in concentration of coarse particles, holding a high polishing force and excellent in cleaning property of the polished face. SOLUTION : This method of production for cerium based polishing agent having a process crushing raw material, a calcination process carrying out a calcinations of the raw material after crushing and a crushing process crushing the calination product, uses a cerium based rare earth carbonate or a mixture of the cerium based rare earth carbonate and the cerium based rare earth oxide and in the crushing process the raw material is crushed in a slurry obtained by mixing the raw material and a solution including a fluorine component to the slurry state. |
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