| 简介 |
PROBLEM TO BE SOLVED : To provide a reaction device which can easily be crystallized, can prevent the cracks and the peel-off of an insulation film which are easy to occur when a metal substrate is distorted in a high temperature environment and can increase the reliability of electrical insulation between the metal substrate and a thin film heater, and to provide an electronic apparatus.
SOLUTION : A micro-reactor 1, which causes a reaction of a reactant, is composed of a top plate 2 which is the metal substrate and a base plate 3, wherein an R2O3 film (Y2O3 film) which is an oxide having a crystal structure of a rare earth element R is formed as an insulation film 31 between the base plate 3 and the thin film heater 32 provided in the surface of the base plate.
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