| 简介 |
PROBLEM TO BE SOLVED : To provide a copper alloy thin film for forming a wiring and an electrode for a liquid crystal display, free from occurrence of a thermal defect and having excellent adhesiveness, and to provide a sputtering target for forming the thin film.
SOLUTION : The wiring and the electrode are composed of a copper alloy having a composition including 0.1 to 3 at% one or more of rare earth elements in total, containing 0.1 to 5 at% Ag and having the rest comprising Cu and inevitable impurities.
COPYRIGHT : (C)2008, JPO&INPIT |
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