| 简介 |
PROBLEM TO BE SOLVED : To provide a method of manufacturing an inorganic EL element having excellent blue light emitting performance, and to provide an inorganic EL crystallized luminescent film, and an inorganic EL element equipped with it.
SOLUTION : This method of manufacturing the inorganic EL element is provided with a pair of electrodes, a semiconductor film formed between the pair of electrodes, and this inorganic EL crystallized luminescent film formed on the semiconductor film and containing a host material represented by chemical formula M2SiS4 : X (wherein M is an alkaline earth metal, and X is a rare-earth metal) and a rare-earth metal ions as a luminescent center added in the host material. The method of manufacturing the inorganic EL element comprises : a luminescent film formation process of forming a film containing the host material; a concentration adjustment material supplying process of supplying a material adjusting the concentration of X in the film containing the host material; and a heat treatment process of providing the inorganic EL crystallized luminescent film by respectively heat-treating the host material and the concentration adjustment material.
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