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铈系研磨材料之制造方法 发明授权

2023-07-13 3010 3276K 0

专利信息

申请日期 2026-04-27 申请号 TW091110040
公开(公告)号 TWI293981B 公开(公告)日 2008-03-01
公开国别 TW 申请人省市代码 全国
申请人 三井金属 业股份有限公司
简介 This invention aims to provide a method of manufacturing a cerium-based abrasive containing coarse particles in lower concentration and having higher polishing abitity and excellent cleanabitity for a polished face. Further, the present invention provides a method of manufacturing a cerium-based abrasive, including the steps of pulverizing a raw material, roasting a raw material after pulverization and disintegrating a raw material after roasting, in which a cerium-based rare earth carbonate or a mixture of a cerium-based rare earth carbonate and a cerium-based rare earth oxide is used as a cerium-based abrasive raw material, and the step of pulverizing a raw material pulverizes a raw material through heating while the material is kept immersed in aqueous solution.


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