| 简介 |
PROBLEM TO BE SOLVED : To provide a new thin film formed on a substrate, a new light emitting element having the thin film as a constituent element, and a new method for producing the thin film involving forming the thin film on the substrate.
SOLUTION : The thin film is formed on the substrate. The thin film contains a rare earth element in a base material. The base material preferably comprises one kind or a combination of two or more kinds selected from the group consisting of AlN, GaN, AlGaAs, SiC, InGaN and InGaAs as the constituent components. The rare earth element is preferably Er. A high-frequency magnetron spattering method can be adopted as the method for producing the thin film. The thin film is formed on the substrate 1 by putting a chip 3 on a target 2, and applying a voltage between the target 2 and the substrate 1. The substrate having the thin film formed thereon can be utilized as a constituent element of the light-emitting element.
COPYRIGHT : (C)2008, JPO&INPIT |
客服热线：
手机版
二维码
