| 简介 |
PURPOSE : A substrate support body with a protection layer for plasma resistance is provided to form a surface resistive to strong corrosion and plasma on a substrate support assembly by supplying a substrate support assembly having a protection layer for intensifying plasma resistivity.
CONSTITUTION : An electrostatic chuck(150) has an upper substrate supporting surface. A protection layer(136) is disposed on the electrostatic chuck. The protection layer is a ceramic material containing rare earth metal. The rare earth metal includes at least one of Sc or Ce. The protection layer includes Y2O3 mixed in metal that is at least one of Al, Mg, Ti and Ta.
© KIPO 2008 |
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