| 简介 |
PROBLEM TO BE SOLVED : To provide a ceramic heater or a glow plug which is increased in strength and durability.
SOLUTION : A ceramic heater 40 comprises : a base 110 of an insulative ceramic; and a heating resistor 120 of a conductive ceramic buried in the base 110. The conductive ceramic includes tungsten carbide and silicon nitride as a primary component. The insulative ceramic has a main phase of silicon nitride crystal and in a grain boundary phase, a rare earth element compound and a silicide represented by W5Si3 or Mo5Si3. When in an X-ray diffraction chart on the base 110, a peak intensity for (101) plane of silicon nitride crystal is defined as a peak intensity X, and a peak intensity for (411) plane of W5Si3 or Mo5Si3 crystal is defined as a peak intensity Y, the value of Peak intensity Y/Peak intensity X as a ratio of the peak intensities is 0.05 or more and 0.4 or less.
SELECTED DRAWING : Figure 2
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