| 简介 |
PROBLEM TO BE SOLVED : To provide an aluminum nitride based sintered compact which generates less grain drops and dust, for example a gas nozzle.
SOLUTION : The aluminum nitride based sintered compact comprises a substrate which has at least the surface part made of sintered particles comprising aluminum nitride as a main component and a plurality of concave parts opening to the surface whose periphery is covered with particles comprising the aluminum nitride as a main component, and a complex oxide containing a rare-earth element and aluminum, a part of which fills the concave parts and the other forms a film on the surface of the substrate so as to connect the concave parts.
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