| 简介 |
PROBLEM TO BE SOLVED : To provide a method for regenerating a plasma treatment container to a nearly new state when the surface of the container is degraded through its use in the plasma environment.
SOLUTION : When a sprayed coating comprising either alumina, a rare earth oxide, polyimide or polybenzimidazole that covers the surface of a substrate of member inside a plasma treatment container becomes degraded through its use in a plasma environment, materials same as that composing the sprayed coating is resprayed over the degraded sprayed coating.
COPYRIGHT : (C)2008, JPO&INPIT |
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