| 简介 |
Disclosed is a ceramic heater wherein defects such as cracks caused by thermal stress are prevented, while preventing corrosion due to a calcium component. Specifically disclosed is a ceramic heater obtained by embedding a heating body, which mainly contains at least one substance selected from silicides, nitrides and carbides of molybdenum and silicides, nitrides and carbides of tungsten, in a base mainly containing a silicon nitride. This ceramic heater is characterized in that the base contains 4-25% by mass of an rare earth element in terms of oxide, 1-8% by mass of a silicide of chromium in terms of silicide, and 0.02-1.0% by mass of an aluminum component in terms of aluminum nitride. |
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