| 简介 |
PROBLEM TO BE SOLVED : To provide an anticorrosive member which shows an excellent corrosion resistance against corrosive halogen gas or its plasma and excellent mechanical properties, etc., enabling its application to parts where its use has been limited due to a high strength and thermal-shock resistance requirements. SOLUTION : The anticorrosive member is composed of a substrate made of a silicon nitride sintered compact and a coating layer formed on the surface of the substrate, wherein the coating layer comprises a crystal phase of RE2Si2O7and/or RE2SiO5(wherein RE is a rare-earth element). COPYRIGHT : (C)2004, JPO |
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