| 简介 |
PURPOSE : An excimer lamp capable of preventing absorption of fluorine ion in sealant in lighting lamp is provided to prevent a creeping discharge between electrodes positioned in an outer surface of an arc tube by insulating an outer surface of an outer electrode.CONSTITUTION : An excimer lamp(1) comprises a discharge vessel and a pair of outer electrodes(31, 32). The discharge vessel includes an arc tube and cover members(221, 222). A sealant(232) is positioned between the arc tube and the cover member. The arc tube does not include silica. A pair of outer electrodes is separately formed in an outer surface of the arc tube. A rare gas and fluoride are enclosed in the discharge vessel. The fluoride is sulfur hexafluoride, carbon tetrafluoride, and nitrogen trifluoride. A pair of outer electrodes is coated with insulating material.© KIPO 2009 |
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