| 简介 |
PROBLEM TO BE SOLVED : To provide an actuator device and a manufacturing method thereof, as well as a liquid jetting head, in which a dense zirconium oxide layer of uniform thickness is formed by preventing the abnormal growth of zirconium oxide crystal.
SOLUTION : On a substrate 10 having a silicon oxide layer (elastic film 50) formed by thermal oxidation on the surface, a piezoelectric element 300 comprising a lower electrode (lower electrode film 60) displaceably provided via the zirconium oxide layer (insulator film 55), a piezoelectric layer 70, and an upper electrode (upper electrode film 80) is equipped, wherein between the silicon oxide layer (elastic film 50) and the zirconium oxide layer (insulator film 55), an intermediate layer (intermediate film 53) composed of at least a kind of material selected from a group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, rare earth oxide is provided.
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