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Method for fabricating a variable-resistance element including heating a RMCoO3 perovskite structure 发明授权

2023-09-26 4040 1388K 0

专利信息

申请日期 2025-06-27 申请号 US11417200
公开(公告)号 US7473612B2 公开(公告)日 2009-01-06
公开国别 US 申请人省市代码 全国
申请人 Tsutomu Kanno; Akihiro Odagawa; Yasunari Sugita; Akihiro Sakai; Hideaki Adachi
简介 A method for fabricating a variable-resistance element, the resistance of a material layer being variable in accordance with an electric current or voltage applied across first and second electrodes, the method including : (1) a first electrode production step; (2) a step of forming the material layer on the first electrode, wherein the material layer comprises an oxide semiconductor having a perovskite structure represented by the chemical formula RMCoO3, wherein R is a rare-earth element and M is an alkaline-earth element; (3) an oxygen treatment step of heating the material layer in an oxygen atmosphere; (4) a step of forming the second electrode on the material layer that was subjected to the oxygen treatment step; and (5) a hydrogen treatment step of heating the material layer in a reducing atmosphere containing hydrogen.


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