| 简介 |
PROBLEM TO BE SOLVED : To provide a ceramic heater in which a fault such as cracks due to thermal stress is prevented and corrosion due to calcium constituent can be prevented.
SOLUTION : The ceramic heater has a heating element having as a principal component at least one out of a silicide, nitride, and carbide of molybdenum and a silicide, nitride, and carbide of tungsten embedded in a substrate having silicon nitride as a principal component. The substrate contains a rare earth element 4-25 wt.% by an oxide conversion and a silicide of chromium 1-8 wt.% by a silicide conversion, and contains an aluminum constituent 0.02-1.0 wt.% by aluminum nitride conversion.
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