| 简介 |
PROBLEM TO BE SOLVED : To provide a hydrogen sensor operating stably under a high-concentration atmosphere.
SOLUTION : The hydrogen sensor comprises : a substrate 2; a rare earth metal film 3 formed on the substrate 2; a protective film 5 that is formed on the rare earth metal film 3 and disperses a hydrogen-permeable metal particle 13 into a ceramic material 15; and a pair of electrode films formed on the protective film and a water-repellent film 4 formed on the electrode films. In the hydrogen sensor, the rare earth metal film 3, the protective film 5, the water-repellent film 5, and the electrode films 16a, 16b are preferably as thick as 5-1000 nm, 5-40 nm, 0.01-1.5 μm, and 5-1000 nm, respectively.
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