申请日期 | 2025-08-04 | 申请号 | US11957880 |
公开(公告)号 | US20080253925A1 | 公开(公告)日 | 2008-10-16 |
公开国别 | US | 申请人省市代码 | 全国 |
申请人 | Jianshe XUE; Ke LIANG | ||
简介 | Provided are a target material for manufacturing an electrode film of a semiconductor device, methods of manufacturing the target material and manufacturing the electrode film. The target material comprises Al-RE alloy or Al—Ni-RE alloy, in which RE is a mixture of rare earth elements comprising La, Ce, Pr, and Nd. |
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