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CERAMIC MEMBER AND CORROSION-RESISTANT MEMBER 发明申请

2023-05-25 4520 44K 0

专利信息

申请日期 2025-07-16 申请号 JP2007083165
公开(公告)号 JP2008239414A 公开(公告)日 2008-10-09
公开国别 JP 申请人省市代码 全国
申请人 TOTO LTD
简介 PROBLEM TO BE SOLVED : To provide a ceramic member having high density, a small particle diameter and excellent plasma resistance. SOLUTION : A ceramic member consisting essentially of a rare earth oxide is composed of a fine structure comprising fine particles. By constituting the ceramic member to have an average particle diameter of less than 3 μm, an open porosity of less than 0.3% measured by an Archimedes method and the maximum particle diameter of less than 5 μm so as to decrease open pores, portions as start points of plasma corrosion can be decreased, and thereby, the obtained ceramic member is excellent in plasma resistance. By constituting the member of small particles while suppressing abnormal particle growth, particle contamination due to production of dust can be decreased. COPYRIGHT : (C)2009, JPO&INPIT


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