| 简介 |
PROBLEM TO BE SOLVED : To provide a heating device that has excellent durability against fluorine plasma and can be used for a long period of time.SOLUTION : The heating device 1 comprises a base body 2 made of ceramics essentially comprising AlN and having a flat upper face and a corrosion resistant layer 11 formed to cover the surface including at least the upper face of the base body. The corrosion resistant layer 11 contains two or more kinds of fluorides selected from fluorides of alkaline earth elements and fluorides of rare earth elements, and low thermal expansion ceramic fine particles.COPYRIGHT : (C)2008, JPO&INPIT |
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