| 简介 |
PROBLEM TO BE SOLVED : To manufacture a stamper for an optical disk having high exposure sensitivity, even when an inorganic resist composed of an oxide of a transition metal is used and high transmittance of UV or a visible light, after exposure development.
SOLUTION : Highly sensitive exposure by a visible laser having nearly 405 nm wavelength is made possible by providing a rare earth metal film 103 between a transparent substrate 101 and an inorganic resist film 104. Since hydrogen diffuses into the rare earth metal film, from a hydrogen containing dielectric film 102, after exposure and transmittance of UV or visible light in the rare earth metal film is enhanced, irradiation with UV from a stamper side becomes possible.
COPYRIGHT : (C)2008, JPO&INPIT |
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