| 简介 |
PROBLEM TO BE SOLVED : To provide stably a carbon-covered electron source of high reliability in which the carbon film covered is not peeled off from the surface of the electron emitting material even if stored for a long period of time. SOLUTION : This is a manufacturing method of an electron source in which the portion other than electron emitting part of the surface of the electron emitting material consisting of hexa-boride of rare earth element is covered with carbon, and applies a process in which the surface of the electron emitting material is roughened and a process to remove an oxide film formed by it before a process to cover with carbon. As a desirable embodiment, the process of roughening the surface of the electron emitting material is treated in a condition of 1×10-3-10 Pa and 1, 300-1, 650°C, and the process of removing the oxide film is treated in 1×10-8-5×10-5Pa and 1, 300-1, 650°C. COPYRIGHT : (C)2008, JPO&INPIT |
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