| 简介 |
PROBLEM TO BE SOLVED : To prevent alteration of the surface of a protecting film to carbonate or hydroxide in a flat panel display(FPD) fabricating process. SOLUTION : First, a substrate 13 is covered with a protecting film 14 formed of alkali earth metal oxide, alkali earth metal composite oxide, rare earth metal oxide or composite oxide composed of alkali earth metal and rare earth metal, followed by surface treatment with a gaseous fruorinating agent, thereby forming a fluoride layer 15 on the protecting film 14. Next, an FPD 10 is assembled with the substrate 13, and thereafter, the fluoride layer 15 is removed. The fluoride layer 15 is preferably MOXFY (where M represents alkali earth metal, composite metal composed of alkali earth metal, rare earth metal or composite oxide composed of alkali earth metal and rare earth metal, 0<=X<2 and 0
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