| 简介 |
PROBLEM TO BE SOLVED : To form a dielectric film whose principal component is PZT stabilizing a polarization property by adding rare earth ion or alkaline earth element to an upper part of wiring layers or between wiring layers made by applying a wiring layer forming process of a semiconductor device in a capacitor and a method of manufacturing the capacitor.
SOLUTION : The capacitor is formed on a substrate 2 and is constituted by laminating a lower electrode 6, a dielectric film 7 and an upper electrode 8, characterized in that a titanium film intervenes between the lower electrode 6 and the dielectric film 7, and the dielectric film 7 includes the rare earth ion containing yttrium or scandium, or alkaline earth metal.
COPYRIGHT : (C)2007, JPO&INPIT |
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