| 简介 |
PROBLEM TO BE SOLVED : To provide a cerium-based abrasive having remarkably improved abrasion rate while suppressing the generation of abrasion damage.
SOLUTION : The cerium-based abrasive comprises ≥95 mass% cerium oxide based on the total rare earth oxide (TREO) and has a particle diameter (D50) of 1.3-4.0μm as a cumulative volume 50% from the small diameter side and determined by laser diffraction scattering method. Preferably, the cerium-based abrasive has a half-value width (2[!theta!]) of the highest peak of cerium oxide of 0.1-0.5° determined by X-ray diffraction analysis with Cu-Kα1 line.
COPYRIGHT : (C)2007, JPO&INPIT |
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