| 简介 |
PROBLEM TO BE SOLVED : To achieve both of the enhancement in oxidation resistance of a base included in a ceramic heater, and the increase in sinterability.SOLUTION : A ceramic heater comprises : a base including silicon nitride as a primary component and additionally, a rare earth element, and provided to extend in an axial direction; and a conductive part including two extending parts buried in the base and extending along the axial direction in parallel with each other and a joint portion. In a section orthogonal to the axial direction, where the two extending parts appear, the content of the rare earth element in the base in a center portion of the ceramic heater is higher than that in the base in a surface layer portion; the content of the rare earth element in the base of the center portion is 0.6-2.0 atm%.SELECTED DRAWING : Figure 3 |
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