| 简介 |
PROBLEM TO BE SOLVED : To provide a method of manufacturing an SRSO film doped with rare earth (RE) elements which uses nano crystallinity (nc) silicon particles.
SOLUTION : There are provided a supply process 702 of Si which is a first target and is embedded with a first RE element such as erbium (Er), ytterbium (Yb), cerium (Ce), praseodymiun (Pr), or terbium (Tr), a supply process 704 of Si which is a second target, a simultaneous sputtering process 708 for first and second targets, a formation process 710 of an Si oxide (SRSO) film which contains much Si for a substrate and is doped with first RE element, and an annealing process 712 of an SRSO film which is doped with first RE element.
COPYRIGHT : (C)2007, JPO&INPIT |
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