| 简介 |
PROBLEM TO BE SOLVED : To provide an alternating current power-supply unit suitable for inhibiting arc from forming in a process of particularly sputtering or the like, which is used in a manufacturing apparatus field for manufacturing a semiconductor, a liquid crystal substrate or the like, and minimizing generated arc energy, and to provide a process for inhibiting the arc in the unit.
SOLUTION : The alternating current power-supply unit 62 comprises an earth current detector 65, a power control/oscillation section 63, an oscillation control means 64 and a power source 37 for controlling a direct current. A ground lead connects a chassis of the alternating current power-supply unit 62 with a chassis 66 of a load device 24, and another ground lead connects a commercial alternating current power source 22 with the chassis of the alternating current power-supply unit 62. The earth current detector 65 detects an earth current, and the oscillation control means 64 detects generated arc on the basis of the earth current detected by the earth detector 65 to make a high-frequency power converter 30 intercept energy supply to the load device 24.
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