| 申请日期 | 2026-03-16 | 申请号 | KR1020060014137 |
| 公开（公告）号 | KR100731407B1 | 公开（公告）日 | 2007-06-15 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | KABUSHIKI KAISHA KOBE SEIKO SHO; KOBELCO RESEARCH INSTITUTE INC; KOBELCO RESEARCH INSTITUTEINC | ||
| 简介 | An Al-base alloy sputtering target comprising Ni and one or more rare earth elements, wherein there are 5.0 × 10 4 /mm 2 or more compounds whose aspect ratio is 2.5 or higher and whose equivalent diameter is 0.2µm or larger, when a cross sectional surface perpendicular to the plane of the target is observed at a magnification of 2000 or higher. | ||
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