| 简介 |
PROBLEM TO BE SOLVED : To provide an aluminum nitride sintered compact having a bending strength of 400 MPa or higher, thermal conductivity coefficient of 150 W/mK or higher and surface roughness (Ra) of 0.8 μm or less. SOLUTION : This aluminum nitride sintered compact is composed of an AlN particle and a grain boundary phase mainly comprising a rare earth aluminum oxide. The sintered compact is characterized in that a large amount of the grain boundary phase exists on two particle interfaces of AlN rather than a triple point, and the maximum width of the triple point is one third or less of the average particle size of AlN. The production method therefor comprises degreasing a formed body including an aluminum nitride powder, a sintering aid and an organic binder, sintering the degreased formed body in a non- oxidizing atmosphere, and then quickly cooling the sintered compact at a cooling rate of 10°C/min or higher until reaching 1, 500°C. It is preferable to continuously perform the processes from degreasing to cooling. COPYRIGHT : (C)2003, JPO |
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