| 申请日期 | 2025-07-29 | 申请号 | JP11365023 |
| 公开（公告）号 | JP3924412B2 | 公开（公告）日 | 2007-06-06 |
| 公开国别 | JP | 申请人省市代码 | 全国 |
| 申请人 | Kyocera Corporation6633 | ||
| 简介 | PROBLEM TO BE SOLVED : To provide a ceramic-based diaphragm substrate which has excellent durability and high displacement property against large loads, even when the thickness of the substrate is small, and has linear deflection against the loads. SOLUTION : This diaphragm substrate 1 is characterized by comprising a silicon nitride-based ceramic having a thickness of =0.02 μm/KPa. | ||
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