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SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD 发明申请

2023-10-05 2140 166K 0

专利信息

申请日期 2025-07-15 申请号 JP2005328929
公开(公告)号 JP2007134650A 公开(公告)日 2007-05-31
公开国别 JP 申请人省市代码 全国
申请人 TOSHIBA CORP
简介 PROBLEM TO BE SOLVED : To provide a semiconductor device which has an MIS transistor with a metal gate, prevents additional man-hours as much as possible, and does not complicate the manufacturing conditions. SOLUTION : This semiconductor device is equipped with an N-channel MIS transistor 15 comprising a substrate 1, a p-type semiconductor layer 3 created on the substrate, a first gate insulating film 9 created on the p-type semiconductor layer, a first gate electrode 11 having an alloy of a metal selected from a group composed of Ru, Pt and Rh provided on the first gate insulating film and a rare earth metal, and n-type impurity regions 7, 8 created on the p-type semiconductor layer at both sides of the first gate insulating electrode. COPYRIGHT : (C)2007, JPO&INPIT


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