| 简介 |
A ceramic heater includes a silicon nitride ceramic and a heating element embedded in the ceramic. The heating element is formed through use of, as a main component, a silicide, carbide, or nitride of at least one element selected from the group consisting of W, Ta, Nb, Ti, Mo, Zr, Hf, V, and Cr. The ceramic includes, as sintering aids, 1 to 20% by weight of at least one rare earth element calculated as an oxide thereof; 0.5 to 8% by weight of V (vanadium) calculated as V2O5, and, 0.5 to 8% by weight of at least one Va/VIa group element selected from the group consisting of Nb, Ta, Cr, Mo, and W calculated as an oxide thereof. The proportion in total of vanadium and the Va/VIa element is 1 to 10% by weight calculated as oxides. The ceramic heater has excellent high-temperature strength and acid resistance. |
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