| 简介 |
PURPOSE : A corrosion resistant multi-layer member is provided to suppress contamination of particles caused due to plasma etching by improving resistance against a halogen-based corrosive gas or plasma of the halogen-based corrosive gas.
CONSTITUTION : A corrosion resistant multi-layer member exposed to a halogen-based gas atmosphere or a halogen-based gas plasma atmosphere, includes a base having a surface coated with a plurality of materials. The coating layer has an outermost surface made of rare earth fluoride, and a layer formed beneath the outer most layer from a rare earth oxide having a porosity of 5%% or lower. The rear earth is one selected from the group consisting of Y, Sc, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu.
© KIPO 2007 |
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