| 简介 |
PROBLEM TO BE SOLVED : To provide an evaporator for a high-melting substance designed to readily provide a vapor of the high-melting substance in a large amount in a state of a secured strength of the substance to be an object of evaporation. SOLUTION : This evaporator for a high-melting substance is obtained by arranging plural magnets 12, different in magnetic poles and alternately adjacent in a state thereof surrounding a high-frequency electrode 2 between the high-frequency electrode 2 to be evaporated and a vacuum chamber 1. The evaporator is capable of causing the discharge across the vacuum chamber 1 and the high- frequency electrode 2 with a high-frequency power source 3, generating a plasma, electrically floating the high-frequency electrode 2 from an earth with a blocking capacitor 8, thereby providing the high-frequency electrode 2 with a negative potential with reference to the plasma potential in a DC system, accelerating positive ions in the plasma in the direction of the high-frequency electrode 2 according to the applied negative potential, making the positive ions collide therewith, heating the high-melting metal constituting the electrode 2 and evaporating the high-melting metal. The evaporated metal is taken out of a takeout port 13 and deposited on a film substrate. |
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