申请日期 | 2025-08-09 | 申请号 | GB0405441 |
公开(公告)号 | GB2399568B | 公开(公告)日 | 2007-03-21 |
公开国别 | GB | 申请人省市代码 | 全国 |
申请人 | EPICHEM LTD | ||
简介 | Rare earth metal precursors, for use in MOCVD techniques have a ligand of the general formula OCR1(R2)CH2X, wherein R1 is H or an alkyl group, R2 is an optionally substituted alkyl group and X is selected from OR and NR2, wherein R is an alkyl group or a substituted alkyl group. Methods of making such precursors and methods of depositing metal oxide layers from such precursors are also described. |
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