| 简介 |
FIELD : technological processes.
SUBSTANCE : invention relates to a method for removing carbon-containing layers and dust from vacuum chambers of plasma installations. Boron-carbon coatings erode when interacting with the plasma during installation. Erosion products are deposited on plasma-contacting surfaces and form re-precipitated boron-carbon layers and fine boron-carbon dust. Invention can be used for regular removal of fine dust and re-precipitated boron-carbon layers, which is necessary for the successful operation of installations. Invention provides conditions for the passage of a heterogeneous reaction of the material of the layer or dust with alcohol vapor to form a volatile ether and the removal of gaseous reaction products and unreacted reagents by means of pumping.
EFFECT : technical result is the gasification of boron-containing layers and the possibility of removing gaseous reaction products by pumping.
5 cl, 2 ex |
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