| 简介 |
PROBLEM TO BE SOLVED : To provide a guide roll electrode for ion bombardment, and an ion bombardment device as well as an ion bombardment method using the same, which can save space and reform the surface of a web unaffected by its material quality.
SOLUTION : The ion bombardment device 1A pivotally supports a guide roll electrode 8 with its surface coated with a dielectric layer by a bearing 3b in a gas box 3A having a guide-in port as well as a guide-out port of a web W, a rare gas guide-in part 4, and bearings 83 at either end. Rare gas such as He, Ar, and Xe is guided in from the rare gas guide-in part 4, the rare gas inside the gas box 3A is ionized by impressing pulse-like high voltage on the guide roll electrode 8 in an atmosphere of high-pressure gas state, is guided in from the guide-in port, made to run along a peripheral face of the guide roll electrode 8, and ion is drawn in to the surface of the web W guided out from guide-out port.
COPYRIGHT : (C)2007, JPO&INPIT |
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