| 简介 |
PURPOSE : A rare earth metal member with excellent corrosion resistance(plasma resistance) which is essentially consisted of a rare earth metal, sufficiently withstands exposure to halogen-base gases or plasma thereof, prevents deterioration of corrosion resistance performance due to regular cleaning, and is free of surface contamination, and a method for manufacturing the same are provided.
CONSTITUTION : A rare earth metal member essentially consisting of a rare earth metal contains 100 ppm or less of at least one metal element except the rare earth metal in a zone ranging from an outermost surface of the rare earth metal member to less than a depth of 2 μm. The rare earth metal element is at least one element selected from the group consisting of Y, Sc, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. The metal element except the rare earth metal is an element selected from the group consisting of Na, K, Ca, Mg, Fe, Cr, Cu, Ni, Zn and Al. The rare earth metal member contains 100 ppm or less of the at least one metal element except the rare earth metal in a zone ranging from the outermost surface of the rare earth metal member to less than a depth of 300 μm.
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